Microscop de masura Hyper MF/MF-U

The worlds highest XY measuring accuracy of (0.9+3L/1000) um. L= measured length in XY plane, stage unloaded.
Slectable LAF (laser auto focus) function.
High operability and repeatability.
Three-axis motorized control.
Power-drive auto focus unit is a standard feature.
Easy positioning via joystick control.

XY stage travel range : 20x150 mm
Measuring unit : Linear encoder
Resolution : 0.01 um
XY stage top size : 300x200 mm
Swiveling function : +- 3 deg.
Max. stage loading : 30 kgf.
Max. workpiece height : 150 mm.